Handbook of Ellipsometry (Materials Science and Process Technology)

The Handbook of Ellipsometry is a critical foundation text on an increasingly critical subject. Ellipsometry, a measurement technique based on phase and amplitude changes in polarized light, is becoming popular in a widening array of applications because of increasing miniaturization of integrated circuits and breakthroughs in knowledge of biological macromolecules deriving from DNA and protein surface research. Ellipsometry does not contact or damage samples, and is an ideal measurement technique for determining optical and physical properties of materials at the nano scale. With the acceleration of new instruments and applications now occurring, this book provides an essential foundation for the current science and technology of ellipsometry for scientists and engineers in industry and academia at the forefront of nanotechnology developments in instrumentation, integrated circuits, biotechnology, and pharmaceuticals. Divided into four parts, this comprehensive handbook covers the theory of ellipsometry, instrumentation, applications, and emerging areas. Experts in the field contributed to its twelve chapters, covering various aspects of ellipsometry. Content: Front Matter • Preface • Table of Contents •Part I. Theory of Ellipsometry 1. Polarized Light and Ellipsometry 2. Optical Physics of Materials 3. Data Analysis for Spectroscopic Ellipsometry •Part II. Instrumentation 4. Optical Components and the Simple PCSA (Polarizer, Compensator, Sample, Analyzer) Ellipsometer 5. Rotating Polarizer and Analyzer Ellipsometry 6. Polarization Modulation Ellipsometry 7. Multichannel Ellipsometry •Part III. Critical Reviews of Some Applications 8. SiO2 Films 9. Theory and Application of Generalized Ellipsometry •Part IV. Emerging Areas in Ellipsometry 10. VUV Ellipsometry 11. Spectroscopic Infrared Ellipsometry 12. Ellipsometry in Life Sciences • Index This handbook has been prepared as a working reference for the safety officer, the environmental engineer and the consultant. For the safety officer, this handbook provides guidelines and instructions in preparing Right-to-Know Reporting Audits, establishing programs and training employees on hazard awareness, and developing and implementing emergency response programs in the workplace and at off-site operations. For the environmental engineer, this handbook provides technical data on toxic chemical properties and an instructional aid on how to properly prepare toxic chemical release inventory reporting "With the acceleration of new instruments and applications now occurring, this book provides an essential foundation for the current science and technology of ellipsometry for scientists and engineers in industry and academia at the forefront of nanotechnology developments in instrumentation, integrated circuits, biotechnology, and pharmaceuticals. Divided into four parts, this comprehensive handbook covers the theory of ellipsometry, instrumentation, applications, and emerging areas. Experts in the field contributed to its twelve chapters, covering various aspects of ellipsometry."--Jacket