MEMS Applications in Electronics and Engineering is a state-of-the-art resource for scientists and students in sensor/ device research. It provides a thorough overview of the latest applications and devices in nano-scale sensors and their role in diagnostics, consumer electronics, automotive, energy harvesting, and loT-based applications. It highlights recent developments in MEMS-based sensors and explains the fundamentals, novel processes, and materials of this global area of focus.This timely and essential book:• Builds knowledge for people working in other domains through its interdisciplinary approach• Identifies recent technologies from MEMS sensors domains and their efficacy in real-life applications• Covers relevant topics for the expert as well as foundational information for non-specialists in MEMS technologiesMEMS Applications in Electronics and Engineering is a valuable guide for students, researchers, and faculty engaged in MEMS-related research and research professionals. Cover Half Title Title Page Copyright Page Contributors Table of Contents Chapter 1: Introduction to MEMS Applications in Electronics and Engineering REFERENCES Chapter 2: Scaling Law 2.1 INTRODUCTION 2.2 FUNDAMENTALS OF SCALING LAW 2.3 APPLICATIONS ACROSS DIFFERENT BRANCHES OF SCIENCE 2.4 CONCLUSION REFERENCES Chapter 3: Recent Progress in Cantilever-Based Sensors: An Overview of Application and Fabrication Techniques 3.1 INTRODUCTION 3.2 METHODS OF DETECTION 3.3 APPLICATION OF CANTILEVER-BASED SENSORS 3.4 RECENT PROGRESS IN FABRICATION IN MEMS DEVICES 3.5 3D PRINTING IN MEMS 3.6 CONCLUSION REFERENCES Chapter 4: Recent Trends in CMOS-MEMS Sensors 4.1 INTRODUCTION 4.2 CMOS-MEMS DEVICES 4.3 APPLICATIONS OF CMOS-MEMS DEVICES 4.4 SHORTCOMINGS OF INTEGRATED CMOS-MEMS DEVICES 4.5 CONCLUSIONS REFERENCES Chapter 5: Mechanics of Materials Considerations in MEMS-Based Medical Devices 5.1 INTRODUCTION 5.2 MEMS PRESSURE TRANSDUCERS 5.3 MEMS ACCELEROMETERS 5.4 COMMON MECHANICAL FAILURES ASSOCIATED WITH MEMS DEVICES 5.5 CONCLUSIONS REFERENCES Chapter 6: Progress in RF MEMS/NEMS Switches 6.1 INTRODUCTION 6.2 RF MEMS DEVICE CONFIGURATIONS 6.3 MULTIPORT SWITCH ACKNOWLEDGMENTS REFERENCES Chapter 7: Optical MEMS (Microspheres and Ring Resonators): Overview of Recent Progress 7.1 INTRODUCTION 7.2 OPTICAL COMPONENTS SUITABLE FOR MOEMS/NOEMS 7.3 BASIC BUILDING BLOCKS OF MOEMS 7.4 APPLICATIONS USING MOEMS/NOEMS 7.5 FUTURE DIRECTION FOR MOEMS/NOEMS REFERENCES Chapter 8: Emerging Trends in MEMS/NEMS Based Technologies for Gas Sensing Applications 8.1 INTRODUCTION 8.2 MICROCANTILEVER (MC) BASED GAS SENSORS 8.3 MEMS-BASED MICRO-HOT PLATE INTEGRATED METAL OXIDE GAS SENSORS 8.4 CONCLUSION REFERENCES Chapter 9: MEMS-Based Energy Harvesting Devices: Overview of Recent Progress 9.1 INTRODUCTION 9.2 THEORETICAL BACKGROUND 9.3 BASIC TRANSDUCTION MECHANISMS 9.4 TRIBOELECTRIC NANOGENERATORS 9.5 CONCLUSIONS REFERENCES Index
