Microsystem Technology and Microrobotics (Microsystem Technology & Microrobotics)

Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots. Pictures and photos ease unterstanding and a wealth of references allow further work.

Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots.

Front Matter....Pages I-XII Ideas and Problems of Microsystem Technology and Microrobotics....Pages 1-23 Microsystem Technology Applications....Pages 24-45 Techniques of Microsystem Technology....Pages 46-65 Key Processes to Produce Micromechanical Components....Pages 66-108 Microactuators: Principles and Examples....Pages 109-208 Microsensors: Principles and Examples....Pages 209-262 MST and Information Processing....Pages 263-302 Microrobotics....Pages 303-365 Back Matter....Pages 366-408