Nanopositioning Technologies : Fundamentals and Applications

"This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies, and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries" -- OhioLink Library Catalog Front Matter....Pages i-vi A Review of Stick–Slip Nanopositioning Actuators....Pages 1-32 Piezoelectric Motor Technology: A Review....Pages 33-59 Mechanical Design of High-Speed Nanopositioning Systems....Pages 61-121 Parallel-Kinematic Nanopositioning Stages Based on Roberts Mechanism....Pages 123-150 Electro-Magnetic Nano-Positioning....Pages 151-181 Modeling of Piezoelectric-Actuated Nanopositioning Stages Involving with the Hysteresis....Pages 183-212 Tracking Control for Nanopositioning Systems....Pages 213-244 Position Sensors for Nanopositioning....Pages 245-294 MEMS Nanopositioners....Pages 295-324 Control Issues of MEMS Nanopositioning Devices....Pages 325-346 A Review of Nanomanipulation in Scanning Electron Microscopes....Pages 347-379 Nanopositioning for Lithography and Data Storage....Pages 381-409 "This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries"--Provided by publisher