Nanofabrication : Techniques and Principles

This title is intended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with nanometer control, and etching patterns and structures at the nanoscale. A distinguishing feature of this book is a focus not on extension of microelectronics fabrication, but rather on techniques applicable for building NEMS, biosensors, nanomaterials, photonic crystals, and other novel devices and structures that will revolutionize society in the coming years Front Matter....Pages i-viii Front Matter....Pages 1-1 Directions in Nanofabrication....Pages 3-8 Front Matter....Pages 9-9 Fundamentals of Electron Beam Exposure and Development....Pages 11-41 Simulation of Electron Beam Exposure and Resist Processing for Nano-Patterning....Pages 43-91 Helium Ion Lithography....Pages 93-116 Nanoimprint Technologies....Pages 117-140 Front Matter....Pages 141-141 Atomic Layer Deposition for Nanotechnology....Pages 143-161 Surface Functionalization in the Nanoscale Domain....Pages 163-190 Nanostructures Based on Self-Assembly of Block Copolymers....Pages 191-216 Epitaxial Growth of Metals on Semiconductors Via Electrodeposition....Pages 217-235 Front Matter....Pages 237-237 Chemical Mechanical Polish for Nanotechnology....Pages 239-274 Deposition, Milling, and Etching with a Focused Helium Ion Beam....Pages 275-300 Laser Nanopatterning....Pages 301-319 Templating and Pattern Transfer Using Anodized Nanoporous Alumina/Titania....Pages 321-344 Annotation Intended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with nanometer control, and etching patterns and structures at the nanoscale. A distinguishing feature of this book is a focus not on extension of microelectronics fabrication, but rather on techniques applicable for building NEMS, biosensors, nanomaterials, photonic crystals, and other novel devices and structures that will revolutionize society in the coming years