Next Generation Micro/Nano Systems

Next Generation Micro/Nano Systems......Page 2 Preface and Committees......Page 5 Table of Contents......Page 8 History and Recent Progress of MEMS Physical Sensors......Page 9 Continuous Process for Large-Area Flexible MEMS......Page 17 Novel Plasmonic Bio-Sensing System Based on Two-Dimensional Gold Patch Arrays for Linear and Nonlinear Regimes......Page 23 Micromachined Devices for Use in Terahertz Applications......Page 28 Rectilinear Electrothermal Actuator Using High-Aspect-Ratio Micromachined Composite of SU-8 and Silicon......Page 36 Wet-Etching Characteristics of SiCN Films Deposited by HWCVD Method......Page 42 Modeling of Piezo-Actuated Stick-Slip Micro-Drives: An Overview......Page 47 Foreign Bodies – The Creation of Symbiotic Jewellery through the Development and Application of Stimulus-Responsive Smart Materials and Microelectromechanical Systems......Page 57 Integrated Microsystems......Page 63 RF-MEMS Components and Networks for High-Performance Reconfigurable Telecommunication and Wireless Systems......Page 73 Functional RF Devices Powered by MEMS Technologies......Page 83 Microfluidic Microchemomechanical Systems......Page 92 Hydrogel-Based Microfluidic Systems......Page 98 Super-Hydrophilic PDMS and PET Surfaces for Microfluidic Devices......Page 104 New Viscosity Data for CuO-Water Nanofluid – The Hysteresis Phenomenon Revisited......Page 109 Keywords Index......Page 115 Authors Index......Page 117